VLSI Metallization: Physics and Technologies

VLSI Metallization: Physics and Technologies

by Krishna Shenai (Editor)


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This comprehensive collection of reprinted articles presents the most important developments on VLSI contact and interconnect technologies and applications. The book covers important developments in metallization of compound semiconductor technologies, and includes a section on metallization reliability and high speed testing.

Product Details

ISBN-13: 9780890065013
Publisher: Artech House, Incorporated
Publication date: 02/29/2000
Series: Artech House Materials Library Series
Pages: 529
Product dimensions: 8.56(w) x 11.06(h) x 1.06(d)

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